Leybold冷凍泵#萊寶高真空泵#萊寶COOLVAC低溫泵 COOLVAC vacuum pumps are gas entrapment cryo pumps where gaseous substances are bound to the cold surfaces within the pump by means of cryocondensation, cryosorption or cryotrapping. For that purpose the cold surfaces (cryopanels) must be cooled to a sufficiently low temperature. The COOLVAC pumps are cooled by two-stage cold heads of the COOLPOWER series using the Gifford/McMahon principle. COOLVAC pumps produce a hydro carbon free ultra high vacuum in the pressure range from 10-3mbar to 10-11 mbar (0.75•10-3 to 0.75•10-11Torr). Leybold萊寶低溫泵是利用(yong)低溫表面(mian)冷凝氣體(ti)的(de)原理制作的(de)真(zhen)空泵。Leybold萊寶低(di)溫泵(beng)(beng)是獲(huo)得(de)清(qing)潔真(zhen)空的極(ji)限壓力zui低(di)、抽氣速率zui大的真(zhen)空泵(beng)(beng),Leybold萊寶(bao)低溫泵(beng)廣泛應(ying)用于(yu)半導體和集成電路的研究(jiu)和生產,以及分(fen)子束研究(jiu)、真空鍍膜設備、真空表(biao)面分(fen)析(xi)儀(yi)器、離子注入機(ji)和空間模擬裝置等方(fang)面。 Leybold冷凍泵#萊寶高真空泵#萊寶COOLVAC低溫泵 COOLVAC 800 BL 零件。844160V1006 泵送速度:800升/秒的 高真空連接法蘭:DN 160 ISO-K 連接真空法蘭脫穎而出:DN 25 ISO-KF COOLVAC 800 BL 零件。844160V1002 泵送速度:800升/秒的 高真空連接法蘭:DN 160 CF 脫穎而出真空連接法蘭:DN 25 ISO-KF COOLVAC 800 BL 零件。844160V9002 泵送速度:800升/秒的 高真空連接法蘭:DN 160 CF 脫穎而出真空連接法蘭:DN 40 CF COOLVAC 800 CL 零件。844160V0006 泵送速度:800升/秒的 高真空連接法蘭:DN 160 ISO-K 連接真空法蘭脫穎而出:DN 25 ISO-KF COOLVAC 800 CL 零件。844160V0002 泵送速度:800升/秒的 高真空連接法蘭:DN 160 CF 脫穎而出真空連接法蘭:DN 25 ISO-KF COOLVAC 1.500 CL 零件。844200V0006 泵送速度:1.500升/秒的 高真空連接法蘭:DN 200 ISO-K 連接法蘭前真空:DN 25 ISO-KF COOLVAC 1.500 CL 零件。844200V0002 泵送速度:1.500升/秒的 高真空連接法蘭:DN 200 CF 脫穎而出真空連接法蘭:DN 25 ISO-KF COOLVAC 2.000 CL 零件。844250V0006 泵送速度:2.100升/秒 高真空連接法蘭:DN 250 ISO-K 前真空連接法蘭:DN 25 ISO-KF COOLVAC 2.000 CL 零件。844250V0002 泵送速度:2.100升/秒 高真空連接法蘭:DN 250 CF 前真空連接法蘭:DN 25 ISO-KF COOLVAC 3.000 CL 零件。844320V0006 泵送速度:3.000升/秒的 高真空連接法蘭:DN 320 ISO-K 前真空連接法蘭:DN 25 ISO-KF COOLVAC 3.000 CL 零件。844320V0004 抽水速度:3.000升/秒 高真空連接法蘭:DN 10“ANSI 脫穎而出真空連接法蘭:DN 25 ISO-KF COOLVAC 5.000 CL 零件。844410 抽氣速度:5.000升/秒 連接法蘭高真空:DN 400 ISO-K 前真空連接法蘭:DN 40 ISO-KF | COOLVAC 10.000 CL 零件。844610V0006 泵送速度:10.000升/秒的 高真空連接法蘭:DN 500 ISO-K 連接真空法蘭脫穎而出:DN 40 ISO-KF | Leybold冷凍泵#萊寶高真空泵#萊寶COOLVAC低溫泵 | COOLVAC 18.000 CL 零件。844630V0006 泵送速度:18.000升/秒 高真空連接法蘭:DN 630 ISO-F 前真空連接法蘭:DN 63 ISO-K | | COOLVAC 30.000 CL 零件。DU0073 泵送速度:30.000升/秒 高真空連接法蘭:DN 35“ANSI 法蘭連接前真空:DN 63 ISO-K | | COOLVAC 60.000 CL 零件。DU0074 泵送速度:57.000升/秒 高真空連接法蘭:DN 1250 ISO-F 前真空連接法蘭:DN 63 ISO-K | Leybold萊寶低(di)溫泵的(de)工作(zuo)原(yuan)理:在低(di)(di)(di)(di)溫(wen)(wen)(wen)(wen)泵內(nei)設有由液氦或(huo)制冷(leng)機冷(leng)卻到(dao)(dao)極低(di)(di)(di)(di)溫(wen)(wen)(wen)(wen)度的(de)(de)冷(leng)板。它使氣(qi)(qi)(qi)體(ti)(ti)凝(ning)(ning)結(jie),并保持凝(ning)(ning)結(jie)物的(de)(de)蒸(zheng)(zheng)汽壓(ya)(ya)(ya)力低(di)(di)(di)(di)于(yu)泵的(de)(de)極限壓(ya)(ya)(ya)力,從而達(da)到(dao)(dao)抽(chou)氣(qi)(qi)(qi)作用(yong)。低(di)(di)(di)(di)溫(wen)(wen)(wen)(wen)抽(chou)氣(qi)(qi)(qi)的(de)(de)主要(yao)作用(yong)是低(di)(di)(di)(di)溫(wen)(wen)(wen)(wen)冷(leng)凝(ning)(ning)、低(di)(di)(di)(di)溫(wen)(wen)(wen)(wen)吸(xi)附(fu)和低(di)(di)(di)(di)溫(wen)(wen)(wen)(wen)捕集。①低(di)(di)(di)(di)溫(wen)(wen)(wen)(wen)冷(leng)凝(ning)(ning):氣(qi)(qi)(qi)體(ti)(ti)分(fen)子(zi)冷(leng)凝(ning)(ning)在冷(leng)板表(biao)面上或(huo)冷(leng)凝(ning)(ning)在已冷(leng)凝(ning)(ning)的(de)(de)氣(qi)(qi)(qi)體(ti)(ti)層(ceng)(ceng)上,其平衡壓(ya)(ya)(ya)力基(ji)本上等(deng)于(yu)冷(leng)凝(ning)(ning)物的(de)(de)蒸(zheng)(zheng)氣(qi)(qi)(qi)壓(ya)(ya)(ya)。抽(chou)空氣(qi)(qi)(qi)時(shi),冷(leng)板溫(wen)(wen)(wen)(wen)度必(bi)須低(di)(di)(di)(di)于(yu) 25K;抽(chou)氫(qing)時(shi),冷(leng)板溫(wen)(wen)(wen)(wen)度更低(di)(di)(di)(di)。低(di)(di)(di)(di)溫(wen)(wen)(wen)(wen)冷(leng)凝(ning)(ning)抽(chou)氣(qi)(qi)(qi)冷(leng)凝(ning)(ning)層(ceng)(ceng)厚度可達(da)10毫米左(zuo)右。②低(di)(di)(di)(di)溫(wen)(wen)(wen)(wen)吸(xi)附(fu):氣(qi)(qi)(qi)體(ti)(ti)分(fen)子(zi)以一個單分(fen)子(zi)層(ceng)(ceng)厚 (10-8厘米數量級)被吸(xi)附(fu)到(dao)(dao)涂(tu)在冷(leng)板上的(de)(de)吸(xi)附(fu)劑表(biao)面上。吸(xi)附(fu)的(de)(de)平衡壓(ya)(ya)(ya)力比(bi)相同溫(wen)(wen)(wen)(wen)度下的(de)(de)蒸(zheng)(zheng)氣(qi)(qi)(qi)壓(ya)(ya)(ya)力低(di)(di)(di)(di)得多。如在 20K時(shi)氫(qing)的(de)(de)蒸(zheng)(zheng)氣(qi)(qi)(qi)壓(ya)(ya)(ya)力等(deng)于(yu)大氣(qi)(qi)(qi)壓(ya)(ya)(ya)力,用(yong) 20K的(de)(de)活性炭(tan)吸(xi)氫(qing)時(shi)吸(xi)附(fu)平衡壓(ya)(ya)(ya)力則(ze)低(di)(di)(di)(di)于(yu)10-8 帕。這樣(yang)就可能在較高溫(wen)(wen)(wen)(wen)度下通(tong)過低(di)(di)(di)(di)溫(wen)(wen)(wen)(wen)吸(xi)附(fu)來(lai)進行(xing)抽(chou)氣(qi)(qi)(qi)。③低溫捕集:在(zai)抽氣溫度下(xia)不能冷凝(ning)的(de)氣體分子,被不斷增長的(de)可(ke)冷凝(ning)氣體層埋葬和吸附。 一般(ban)說來,泵(beng)的(de)(de)(de)極(ji)限(xian)壓(ya)(ya)力就(jiu)是冷(leng)板溫度(du)(du)下的(de)(de)(de)被冷(leng)凝(ning)(ning)(ning)氣(qi)體(ti)的(de)(de)(de)蒸(zheng)(zheng)(zheng)氣(qi)壓(ya)(ya)力。圖1為某些氣(qi)體(ti)的(de)(de)(de)蒸(zheng)(zheng)(zheng)氣(qi)壓(ya)(ya)力 -溫度(du)(du)關系曲線。從(cong)圖中可以看出溫度(du)(du)為120K時,水的(de)(de)(de)蒸(zheng)(zheng)(zheng)氣(qi)壓(ya)(ya)已低(di)于(yu)10-8帕。溫度(du)(du)為20K時,除(chu)氦、氖和(he)氫外,其他氣(qi)體(ti)的(de)(de)(de)蒸(zheng)(zheng)(zheng)氣(qi)壓(ya)(ya)也(ye)低(di)于(yu)10-8帕。但由(you)于(yu)被抽(chou)容器(qi)和(he)低(di)溫冷(leng)板的(de)(de)(de)溫度(du)(du)不同,泵(beng)的(de)(de)(de)極(ji)限(xian)壓(ya)(ya)力高(gao)于(yu)冷(leng)凝(ning)(ning)(ning)物(wu)的(de)(de)(de)蒸(zheng)(zheng)(zheng)氣(qi)壓(ya)(ya)。對于(yu)室溫下的(de)(de)(de)容器(qi),低(di)溫板為20K時,泵(beng)的(de)(de)(de)極(ji)限(xian)壓(ya)(ya)力約為冷(leng)凝(ning)(ning)(ning)物(wu)蒸(zheng)(zheng)(zheng)氣(qi)壓(ya)(ya)力的(de)(de)(de)4倍。 |